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Found 1 from your keywords: author=Misumi, Ichiko,
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Nanoscale standards by metrological AFM and other instruments /
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Institute of Physics (Great Britain),Misumi, Ichiko,

"Version: 20210205"--Title page verso.Includes bibliographical references.1. Nano dimensional standards -- 1.1. Nano dimensional standards -- 1.2. Metrological atomic force microscopes -- 1.3. The guide to the expression of uncertainty in measurement (The GUM, ISO/IEC Guide 98-3:2008) -- 1.4. Summary2. One-dimensional grating -- 2.1. Importance of one-dimensional grating as a nano dimensional s…

Edition
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ISBN/ISSN
9780750331913
Collation
1 online resource (various pagings) :illustrations (some color).
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