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Found 1 from your keywords: subject="Surface chemistry & a...
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Chemical vapour deposition :growth processes on an atomic level /
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Institute of Physics (Great Britain),Larsson, Karin,

"Version: 20221201"--Title page verso.Includes bibliographical references.1. Introduction -- 1.1. Chemical vapour phase deposition -- 1.2. Overview of thin film characterization techniques -- 1.3. Theoretical modelling and simulations2. Common CVD reactor setups -- 2.1. General -- 2.2. Classification of CVD reactors3. CVD processes on an atomic level -- 3.1. Introduction -- 3.2. Chemical reacti…

Edition
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ISBN/ISSN
9780750331074
Collation
1 online resource (various pagings) :illustrations (some color).
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Call Number
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