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Found 1 from your keywords: subject="Nanolithography."
cover
Nanofabrication :nanolithography techniques and their applications /
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Institute of Physics (Great Britain),Teresa, Jos?e Mar?ia de,

"Version: 20201201"--Title page verso.Includes bibliographical references.1. Introduction to nanolithography techniques and their applications / Jos?e Mar?ia De Teresa -- 2. Optical lithography / Francesc Perez-Murano, Jos?e Ignacio Mart?in and Jos?e Mar?ia De Teresa -- 3. Electron beam lithography and its use on 2D materials / Vito Cleric?o, Mario Amado and Enrique Diez -- 4. Focused electron …

Edition
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ISBN/ISSN
9780750326087
Collation
1 online resource (various pagings) :illustrations (some color).
Series Title
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Call Number
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