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Found 2 from your keywords: subject="Mirrors"
cover
Efficient extreme ultraviolet mirror design :an FDTD approach /
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Institute of Physics (Great Britain),Lee, Yen-Min,

"Version: 202109"--Title page verso.Includes bibliographical references.1. Introduction to optical lithography -- 1.1. Principle of optical lithography -- 1.2. Evolution and history -- 1.3. Interrelation with IC manufacturing -- 1.4. The next-generation optical lithography : extreme ultraviolet (EUV) lithography2. Multilayer mirrors in extreme ultraviolet lithography -- 2.1. Composition and fab…

Edition
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ISBN/ISSN
9780750326520
Collation
1 online resource (various pagings) :illustrations (some color).
Series Title
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Call Number
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cover
Elliptical mirrors :applications in microscopy /
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Institute of Physics (Great Britain),Liu, Jian

"Version: 20181001"--Title page verso.Includes bibliographical references.1. Research and application of reflective microscopy -- 1.1. Introduction -- 1.2. Current situation of research on reflective microscopy -- 1.3. The current situation of application of reflective microscopy -- 1.4. Summary2. Apodization factor and linearly polarized light focusing properties of elliptical mirror -- 2.1. I…

Edition
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ISBN/ISSN
9780750316293
Collation
1 online resource (various pagings) :illustrations (some color).
Series Title
-
Call Number
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