"Version: 20220701"--Title page verso.Includes bibliographical references.The story of BA Flight 9--from the Introduction to the 1st edition -- A few questions to Andrew Townley-Freeman -- 1. Introduction to MEMS and RF-MEMS : from the early days of microsystems to modern RF-MEMS passives -- 1.1. Introduction to semiconductor and microsystem technologies -- 1.2. Introduction to RF-MEMS -- 1.3. …
"Version: 20250801"--Title page verso.Includes bibliographical references.1. Introduction of nano-microsystems -- 1.1. Introduction -- 1.2. Systems for microfluidics and related fields -- 1.3. Analysis and nano-microsystems -- 1.4. About the structure of the book and how it is read -- 1.5. Summary2. Design and concept for system thinking -- 2.1. Introduction -- 2.2. Lab-on-a-chip -- 2.3…
"Version: 20171101"--Title page verso.Includes bibliographical references.1. Introduction to MEMS and RF-MEMS : from the early days of microsystems to modern RF-MEMS passives -- 1.1. Introduction to semiconductor and microsystem technologies -- 1.2. Introduction to RF-MEMS2. Expectations versus actual market of RF-MEMS : analysis and explanation of a repeatedly fluctuating scenario -- 2.1. Gene…