"Version: 20180901"--Title page verso."A Morgan & Claypool publication as part of IOP Concise Physics"--Title page verso.Includes bibliographical references.1. A numerical solution of boundary value problem using the finite difference method -- 1.1. Statement of the problem -- 1.2. Approximation to derivatives -- 1.3. The finite difference method2. Differential equations of some elementary func…
"Version: 202109"--Title page verso.Includes bibliographical references.1. Introduction to optical lithography -- 1.1. Principle of optical lithography -- 1.2. Evolution and history -- 1.3. Interrelation with IC manufacturing -- 1.4. The next-generation optical lithography : extreme ultraviolet (EUV) lithography2. Multilayer mirrors in extreme ultraviolet lithography -- 2.1. Composition and fab…