"Version: 20220701"--Title page verso.Includes bibliographical references.The story of BA Flight 9--from the Introduction to the 1st edition -- A few questions to Andrew Townley-Freeman -- 1. Introduction to MEMS and RF-MEMS : from the early days of microsystems to modern RF-MEMS passives -- 1.1. Introduction to semiconductor and microsystem technologies -- 1.2. Introduction to RF-MEMS -- 1.3. …