"Version: 20161001"--Title page verso.Includes bibliographical references.4. Impact device processing and scaling on RTS -- 4.1. Processing effects on RTS -- 4.2. RTS in fin-type architectures -- 4.3. Nanometric scaling aspects of RTS -- 4.4. RTS in 'beyond-silicon' devices5. Operational and reliability aspects of RTS -- 5.1. Switching AC operation of RTS -- 5.2. Impact of uniform and HC degrad…