Nanofabrication :nanolithography techniques and their applications /

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"Version: 20201201"--Title page verso.Includes bibliographical references.1. Introduction to nanolithography techniques and their applications / Jos?e Mar?ia De Teresa -- 2. Optical lithography / Francesc Perez-Murano, Jos?e Ignacio Mart?in and Jos?e Mar?ia De Teresa -- 3. Electron beam lithography and its use on 2D materials / Vito Cleric?o, Mario Amado and Enrique Diez -- 4. Focused electron beam induced deposition / Javier Pablo-Navarro, Soraya Sangiao, C?esar Mag?en and Jos?e Mar?ia De Teresa -- 5. Focused ion beam induced processing / Pablo Or?us, Rosa C?ordoba and Jos?e Mar?ia De Teresa -- 6. Scanning probe lithography / Ricardo Garcia -- 7. Soft thermal nanoimprint and hybrid processes to produce complex structures / Isabel Rodr?iguez and Jaime Hern?andez -- 8. Stencil lithography / Oscar Vazquez-Mena and Luis Guillermo Villanueva -- 9. Ice lithography / Anpan Han, Ding Zhao and Min Qiu -- 10. Magnetic nanopatterning via thermal scanning probe lithography / Edoardo Albisetti, Daniela Petti, Riccardo Bertacco and Elisa Riedo -- 11. Nanofabrication of three-dimensional magnetic structures / D?edalo Sanz-Hern?andez, Claire Donnelly, Lucas P?erez and Amalio Fern?andez-Pacheco -- 12. FEBIP for functional nanolithography of 2D nanomaterials / Songkil Kim and Andrei G. Fedorov.A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of resolution, throughput, number of steps needed, cost, etc. At the end of this section, the reader will be able to decide which technique to use for different applications. The second section explores more specific applications of the nanolithography techniques previously described; as well as new techniques and applications. In some cases, the processes described in these chapters involve a combination of several nanolithography techniques. This section is less general but provides the reader with real examples.Also available in print.Mode of access: World Wide Web.System requirements: Adobe Acrobat Reader, EPUB reader, or Kindle reader.Professor Jos?e M. De Teresa leads the group of Nanofabrication and Advanced Microscopies (NANOMIDAS) at the Institute of Nanoscience and Materials Science of Aragon (CSIC-University of Zaragoza, Spain). He is the coordinator of the Spanish network on Nanolithography (NANOLITO) and the FIB-SEM (Focused Ion Beam - Scanning Electron Microscopy) area in the Spanish National facility for Advanced Microscopies. Professor De Teresa is the Board vice-Chair of the Condensed Matter Division in the European Physical Society. Professor De Teresa's main research interests are nanofabrication with focused electron and ion beams, magnetic nanostructures, nano-superconductivity and new materials.Title from PDF title page (viewed on January 14, 2021).

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Publisher

: .,

Collation

1 online resource (various pagings) :illustrations (some color).

Language

English

ISBN/ISSN

9780750326087

Classification

621.381531

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Edition

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Subject(s)

SCIENCE / Nanoscience.
Nanostructured materials
Nanotechnology.
Nanolithography.

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Statement of Responsibility

edited by Jos?e Mar?ia De Teresa.

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