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Found 1 from your keywords: author="Cox, David C."
cover
Introduction to focused ion beam nanometrology /
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Institute of Physics (Great Britain),Morgan & Claypool Publishers,Cox, David C.

"Version: 20151001"--Title page verso."A Morgan & Claypool publication as part of IOP Concise Physics"--Title page verso.Includes bibliographical references.Preface -- Acknowledgements -- Author biography -- 1. Metrology -- 1.1. What is metrology? -- 1.2. Metrology in the FIB2. Focused ion beam -- 2.1. Introduction to the FIB instrument -- 2.2. Types of instrument -- 2.3. Gas injection systems …

Edition
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ISBN/ISSN
9781681740843
Collation
1 online resource (various pagings) :illustrations (some color).
Series Title
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Call Number
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